Introduction to using the MA6 Mask Aligner
| Module Information | |
|---|---|
| Authors: | John Nicholson, Phil Bascom, Adam Black, Matthew Mattingly |
| Topics: | Clean Room Mask Aligner |
| Audience | UMass student |
| Keywords: | mask, wafer, photolithography |
| Release: | Alpha Beta Gold |
Curricular Materials:
| Title | Author | Download |
|---|---|---|
| Transcript | John Nicholson, Phil Bascom | Doc |
| Script Template | Phil Bascom | Doc |
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